Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date | Approx Value ⓘ |
|---|---|---|---|---|
| 6602383 | Apparatus and methods for controlling workpiece surface exposure to processing liquids during the fabrication of microelectronic components | Robert W. Batz, Jr., Reed A. Blackburn, Steven Edward Kelly | 2003-08-05 | $1,679,000 |
| 6351682 | Semiconductor processing workpiece position sensing | — | 2002-02-26 | $2,421,000 |
| 6139703 | Cathode current control system for a wafer electroplating apparatus | Kyle M. Hanson, K. Chris Haugan, Kevin W. Coyle, Robert W. Berner | 2000-10-31 | $7,893,000 |
| 6015462 | Semiconductor processing workpiece position sensing | — | 2000-01-18 | $3,314,000 |
| 6004440 | Cathode current control system for a wafer electroplating apparatus | Kyle M. Hanson, K. Chris Haugan, Kevin W. Coyle, Robert W. Berner | 1999-12-21 | $1,727,000 |
| 5379651 | Point optical beam electronic rotometer | — | 1995-01-10 |