Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6319841 | Semiconductor processing using vapor mixtures | Eric J. Bergman, Robert W. Berner | 2001-11-20 |
| 6162734 | Semiconductor processing using vapor mixtures | Eric J. Bergman, Robert W. Berner | 2000-12-19 |
| 5954911 | Semiconductor processing using vapor mixtures | Eric J. Bergman, Robert W. Berner | 1999-09-21 |