Issued Patents All Time
Showing 51–75 of 85 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6699373 | Apparatus for processing the surface of a microelectronic workpiece | Kyle M. Hanson, Thomas H. Oberlitner, Linlin Chen, John M. Pedersen, Vladimir Zila | 2004-03-02 |
| 6672820 | Semiconductor processing apparatus having linear conveyer system | Kyle M. Hanson, Mark Dix, Wayne J. Schmidt, Kevin W. Coyle | 2004-01-06 |
| 6654122 | Semiconductor processing apparatus having lift and tilt mechanism | Kyle M. Hanson, Mark Dix, Vladimir Zila | 2003-11-25 |
| 6645355 | Semiconductor processing apparatus having lift and tilt mechanism | Kyle M. Hanson, Mark Dix, Vlad Zila | 2003-11-11 |
| 6645356 | Methods and apparatus for processing the surface of a microelectronic workpiece | Kyle M. Hanson, Thomas H. Oberlitner, Linlin Chen, John M. Pedersen, Vladimir Zila | 2003-11-11 |
| 6623609 | Lift and rotate assembly for use in a workpiece processing station and a method of attaching the same | Randy Harris | 2003-09-23 |
| 6527926 | Electroplating reactor including back-side electrical contact apparatus | Kyle M. Hanson, Robert W. Batz, Jr., James T. Kuechmann | 2003-03-04 |
| 6497801 | Electroplating apparatus with segmented anode array | Kyle M. Hanson | 2002-12-24 |
| 6440178 | Modular semiconductor workpiece processing tool | Robert W. Berner, Wayne J. Schmidt, Kevin W. Coyle, Vladimir Zila, Worm Lund | 2002-08-27 |
| 6428660 | Reactor vessel having improved cup, anode and conductor assembly | Kyle M. Hanson | 2002-08-06 |
| 6428662 | Reactor vessel having improved cup, anode and conductor assembly | Kyle M. Hanson | 2002-08-06 |
| 6409892 | Reactor vessel having improved cup, anode, and conductor assembly | Kyle M. Hanson | 2002-06-25 |
| 6342137 | Lift and rotate assembly for use in a workpiece processing station and a method of attaching the same | Martin Bleck | 2002-01-29 |
| 6322678 | Electroplating reactor including back-side electrical contact apparatus | Kyle M. Hanson | 2001-11-27 |
| 6322677 | Lift and rotate assembly for use in a workpiece processing station and a method of attaching the same | Martin Bleck | 2001-11-27 |
| 6309520 | Methods and apparatus for processing the surface of a microelectronic workpiece | Kyle M. Hanson, Thomas H. Oberlitner, Linlin Chen, John M. Pedersen, Vladimir Zila | 2001-10-30 |
| 6309524 | Methods and apparatus for processing the surface of a microelectronic workpiece | Kyle M. Hanson, Thomas H. Oberlitner, Linlin Chen, John M. Pedersen, Vladimir Zila | 2001-10-30 |
| 6303010 | Methods and apparatus for processing the surface of a microelectronic workpiece | Kyle M. Hanson, Thomas H. Oberlitner, Linlin Chen, John M. Pedersen, Vladimir Zila | 2001-10-16 |
| 6280582 | Reactor vessel having improved cup, anode and conductor assembly | Kyle M. Hanson | 2001-08-28 |
| 6280583 | Reactor assembly and method of assembly | Kyle M. Hanson | 2001-08-28 |
| 6228232 | Reactor vessel having improved cup anode and conductor assembly | Kyle M. Hanson | 2001-05-08 |
| 6203582 | Modular semiconductor workpiece processing tool | Robert W. Berner, Wayne J. Schmidt, Kevin W. Coyle, Vladimir Zila, Worm Lund | 2001-03-20 |
| 6168695 | Lift and rotate assembly for use in a workpiece processing station and a method of attaching the same | Martin Bleck | 2001-01-02 |
| 6091498 | Semiconductor processing apparatus having lift and tilt mechanism | Kyle M. Hanson, Mark Dix, Vladimir Zila | 2000-07-18 |
| 6080291 | Apparatus for electrochemically processing a workpiece including an electrical contact assembly having a seal member | Kyle M. Hanson | 2000-06-27 |