| 6843859 |
Dump door |
Wyland L. Atkins |
2005-01-18 |
| 6746565 |
Semiconductor processor with wafer face protection |
Timothy J. Reardon, Eric J. Bergman |
2004-06-08 |
| 6733649 |
Electrochemical processing method |
Kenneth C. Haugan, Larry R. Radloff, Harry J. Geyer |
2004-05-11 |
| 6726848 |
Apparatus and method for single substrate processing |
Eric T. Hansen, Victor Mimken, M. Rao Yalamanchili, John Rosato |
2004-04-27 |
| 6663762 |
Plating system workpiece support having workpiece engaging electrode |
Lyndon Graham, Kyle M. Hanson |
2003-12-16 |
| 6358388 |
Plating system workpiece support having workpiece-engaging electrodes with distal contact-part and dielectric cover |
Lyndon Graham, Kyle M. Hanson |
2002-03-19 |
| 6342137 |
Lift and rotate assembly for use in a workpiece processing station and a method of attaching the same |
Daniel J. Woodruff |
2002-01-29 |
| 6322677 |
Lift and rotate assembly for use in a workpiece processing station and a method of attaching the same |
Daniel J. Woodruff |
2001-11-27 |
| 6274013 |
Electrode semiconductor workpiece holder |
Kenneth C. Haugan, Larry R. Radloff, Harry J. Geyer |
2001-08-14 |
| 6168695 |
Lift and rotate assembly for use in a workpiece processing station and a method of attaching the same |
Daniel J. Woodruff |
2001-01-02 |
| 6022484 |
Semiconductor processor with wafer face protection |
Timothy J. Reardon, Eric J. Bergman |
2000-02-08 |
| 5985126 |
Semiconductor plating system workpiece support having workpiece engaging electrodes with distal contact part and dielectric cover |
Lyndon Graham, Kyle M. Hanson |
1999-11-16 |
| 5980706 |
Electrode semiconductor workpiece holder |
Kenneth C. Haugan, Larry R. Radloff, Harry J. Geyer |
1999-11-09 |
| 5762751 |
Semiconductor processor with wafer face protection |
Timothy J. Reardon, Eric J. Bergman |
1998-06-09 |