Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7694688 | Wet clean system design | Paul Lester, Scott Meyer, Wyland L. Atkins, Douglas Richards, Constantin Predoaica +6 more | 2010-04-13 |
| 6878213 | Process and system for rinsing of semiconductor substrates | Jane Fahrenkrug, Curtis R. Olson, Paul Lindquist | 2005-04-12 |
| 6726848 | Apparatus and method for single substrate processing | Eric T. Hansen, Victor Mimken, Martin Bleck, M. Rao Yalamanchili | 2004-04-27 |