Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8563435 | Method of reducing damage to an electron beam inspected semiconductor substrate, and methods of inspecting a semiconductor substrate | David Daycock, Paul A. Morgan, Shawn D. Lyonsmith | 2013-10-22 |
| 8334209 | Method of reducing electron beam damage on post W-CMP wafers | David Daycock, Paul A. Morgan, Shawn D. Lyonsmith | 2012-12-18 |
| 6878213 | Process and system for rinsing of semiconductor substrates | John Rosato, Jane Fahrenkrug, Paul Lindquist | 2005-04-12 |