Issued Patents All Time
Showing 25 most recent of 53 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11935756 | Pitch reduction technology using alternating spacer depositions during the formation of a semiconductor device and systems including same | Baosuo Zhou, Mirzafer Abatchev, Ardavan Niroomand, Shuang Meng, Joseph Neil Greeley +1 more | 2024-03-19 |
| 11335563 | Pitch reduction technology using alternating spacer depositions during the formation of a semiconductor device and systems including same | Baosuo Zhou, Mirzafer Abatchev, Ardavan Niroomand, Shuang Meng, Joseph Neil Greeley +1 more | 2022-05-17 |
| 10607844 | Pitch reduction technology using alternating spacer depositions during the formation of a semiconductor device and systems including same | Baosuo Zhou, Mirzafer Abatchev, Ardavan Niroomand, Shuang Meng, Joseph Neil Greeley +1 more | 2020-03-31 |
| 10096483 | Pitch reduction technology using alternating spacer depositions during the formation of a semiconductor device and systems including same | Baosuo Zhou, Mirzafer Abatchev, Ardavan Niroomand, Shuang Meng, Joseph Neil Greeley +1 more | 2018-10-09 |
| 9761457 | Pitch reduction technology using alternating spacer depositions during the formation of a semiconductor device and systems including same | Baosuo Zhou, Mirzafer Abatchev, Ardavan Niroomand, Shuang Meng, Joseph Neil Greeley +1 more | 2017-09-12 |
| 9305782 | Pitch reduction technology using alternating spacer depositions during the formation of a semiconductor device and systems including same | Baosuo Zhou, Mirzafer Abatchev, Ardavan Niroomand, Shuang Meng, Joseph Neil Greely +1 more | 2016-04-05 |
| 9269586 | Selective metal deposition over dielectric layers | Nishant Sinha | 2016-02-23 |
| 9005473 | Gaseous compositions comprising hydrogen fluoride and an alkylated ammonia derivative | Mark Kiehlbauch, J. Neil Greeley | 2015-04-14 |
| 8852851 | Pitch reduction technology using alternating spacer depositions during the formation of a semiconductor device and systems including same | Baosuo Zhou, Mirzafer Abatchev, Ardavan Niroomand, Shuang Meng, Joseph Neil Greeley +1 more | 2014-10-07 |
| 8809198 | Nano-crystal etch process | Ramakanth Alapati, Max Hineman | 2014-08-19 |
| 8603318 | Method of selectively removing conductive material | Rita J. Klein, Dale W. Collins, Joseph Neil Greeley, Nishant Sinha | 2013-12-10 |
| 8598632 | Integrated circuit having pitch reduced patterns relative to photoithography features | Luan C. Tran, William T. Rericha, John Lee, Ramakanth Alapati, Sheron Honarkhah +7 more | 2013-12-03 |
| 8563435 | Method of reducing damage to an electron beam inspected semiconductor substrate, and methods of inspecting a semiconductor substrate | David Daycock, Shawn D. Lyonsmith, Curtis R. Olson | 2013-10-22 |
| 8513135 | Methods of modifying oxide spacers | Joseph Neil Greeley, Mark Kiehlbauch | 2013-08-20 |
| 8500913 | Methods for treating surfaces, and methods for removing one or more materials from surfaces | Mark Kiehlbauch, Gurtej S. Sandhu | 2013-08-06 |
| 8338297 | Selective metal deposition over dielectric layers | Nishant Sinha | 2012-12-25 |
| 8334209 | Method of reducing electron beam damage on post W-CMP wafers | David Daycock, Shawn D. Lyonsmith, Curtis R. Olson | 2012-12-18 |
| 8252194 | Methods of removing silicon oxide | Mark Kiehlbauch, J. Neil Greeley | 2012-08-28 |
| 8207576 | Pitch reduced patterns relative to photolithography features | Luan C. Tran, William T. Rericha, John Lee, Ramakanth Alapati, Sheron Honarkhah +7 more | 2012-06-26 |
| 8183154 | Selective metal deposition over dielectric layers | Nishant Sinha | 2012-05-22 |
| 8119535 | Pitch reduced patterns relative to photolithography features | Luan C. Tran, William T. Rericha, John Lee, Ramakanth Alapati, Sheron Honarkhah +7 more | 2012-02-21 |
| 8048812 | Pitch reduced patterns relative to photolithography features | Luan C. Tran, William T. Rericha, John Lee, Ramakanth Alapati, Sheron Honarkhah +7 more | 2011-11-01 |
| 8026180 | Methods of modifying oxide spacers | Joseph Neil Greeley, Mark Kiehlbauch | 2011-09-27 |
| 7935242 | Method of selectively removing conductive material | Rita J. Klein, Dale W. Collins, Joseph Neil Greeley, Nishant Sinha | 2011-05-03 |
| 7915735 | Selective metal deposition over dielectric layers | Nishant Sinha | 2011-03-29 |