Issued Patents All Time
Showing 51–53 of 53 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6399492 | Ruthenium silicide processing methods | Michael T. Andreas | 2002-06-04 |
| 6290863 | Method and apparatus for etch of a specific subarea of a semiconductor work object | Kevin J. Torek | 2001-09-18 |
| 6017827 | System and method for mixing a gas into a solvent used in semiconductor processing | Jonathan Morgan | 2000-01-25 |