Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8002899 | Method and apparatus for mask pellicle adhesive residue cleaning | Banqiu Wu, Richard Lee, Ajay Kumar, James S. Papanu, Chung Huan Jeon | 2011-08-23 |
| 6726848 | Apparatus and method for single substrate processing | Eric T. Hansen, Victor Mimken, Martin Bleck, John Rosato | 2004-04-27 |
| 6230720 | Single-operation method of cleaning semiconductors after final polishing | Kari B. Myli, Larry W. Shive | 2001-05-15 |