Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12392023 | Methods and apparatus for depositing amorphous indium tin oxide film | Yaoying ZHONG, Siew Kit Hoi, Palaniappan Chidambaram, Jaysen Chiam, Li Ying Choo +2 more | 2025-08-19 |
| D1053230 | Sputter target for a physical vapor deposition chamber | Siew Kit Hoi, Mengxue Wu, Palaniappan Chidambaram | 2024-12-03 |
| 11784033 | Methods and apparatus for processing a substrate | Mengxue Wu, Siew Kit Hoi, Yue Cui, Chul Nyoung Lee, Palaniappan Chidambaram +1 more | 2023-10-10 |
| 11761078 | Methods and apparatus for processing a substrate | Mengxue Wu, Siew Kit Hoi | 2023-09-19 |