Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12228395 | Substrate position calibration for substrate supports in substrate processing systems | Tomoharu Matsushita, Aravind Kamath, Jallepally Ravi, Cheng-Hsiung Tsai | 2025-02-18 |
| 12125728 | Substrate carrier | Fred Eric Ruhland, Sumit Subhash Patankar, Vijay D. Parkhe, Daniel Lee Diehl, Mingwei Zhu +1 more | 2024-10-22 |
| 11251028 | Pre-clean chamber with integrated shutter garage | Cheng-Hsiung Tsai, Ananthkrishna Jupudi, Sarath Babu, Manjunatha Koppa | 2022-02-15 |
| 11201078 | Substrate position calibration for substrate supports in substrate processing systems | Tomoharu Matsushita, Aravind Kamath, Jallepally Ravi, Cheng-Hsiung Tsai | 2021-12-14 |
| D904640 | Substrate carrier | Fred Eric Ruhland, Sumit Subhash Patankar, Vijay D. Parkhe, Daniel Lee Diehl, Mingwei Zhu +1 more | 2020-12-08 |
| D568914 | Substrate support lift pin | David T. Or, Keith Kuang-Kuo Koai, Takahiro Ito, Koji Ota, Hiroshi Sato | 2008-05-13 |
| 6887317 | Reduced friction lift pin | David T. Or, Keith Kuang-Kuo Koai, Takahiro Ito, Koji Ota, Hiroshi Sato | 2005-05-03 |
| 5589224 | Apparatus for full wafer deposition | Avi Tepman, Takeshi Jinbo, Akihiko Saito | 1996-12-31 |
| 5548964 | Method and apparatus for cooling a vacuum device | Takeshi Jinbo | 1996-08-27 |