Issued Patents All Time
Showing 1–15 of 15 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12148629 | Shutter disk | Kang Zhang, Junqi Wei, Yueh Sheng Ow, Kelvin Boh, Yuichi Wada +1 more | 2024-11-19 |
| 12100577 | High conductance inner shield for process chamber | Ananthkrishna Jupudi, Yueh Sheng Ow, Junqi Wei, Kelvin Boh, Yuichi Wada +1 more | 2024-09-24 |
| 12080522 | Preclean chamber upper shield with showerhead | Ananthkrishna Jupudi, Yueh Sheng Ow, Junqi Wei, Kelvin Boh, Kang Zhang +1 more | 2024-09-03 |
| 11881385 | Methods and apparatus for reducing defects in preclean chambers | Yueh Sheng Ow, Yuichi Wada, Junqi Wei, Kang Zhang, Ananthkrishna Jupudi +2 more | 2024-01-23 |
| 11862480 | Shutter disk | Kang Zhang, Junqi Wei, Yueh Sheng Ow, Kelvin Boh, Yuichi Wada +1 more | 2024-01-02 |
| D973609 | Upper shield with showerhead for a process chamber | Ananthkrishna Jupudi, Yueh Sheng Ow, Junqi Wei, Kelvin Boh, Kang Zhang +1 more | 2022-12-27 |
| D971167 | Lower shield for a substrate processing chamber | Ananthkrishna Jupudi, Yueh Sheng Ow, Junqi Wei, Kelvin Boh, Yuichi Wada +1 more | 2022-11-29 |
| 11476097 | Common electrostatic chuck for differing substrates | Vinodh Ramachandran, Ananthkrishna Jupudi | 2022-10-18 |
| 11289357 | Methods and apparatus for high voltage electrostatic chuck protection | Yuichi Wada, Yueh Sheng Ow, Ananthkrishna Jupudi, Clinton GOH, Kai Liang Liew | 2022-03-29 |
| 11251028 | Pre-clean chamber with integrated shutter garage | Cheng-Hsiung Tsai, Ananthkrishna Jupudi, Manjunatha Koppa, Hiroyuki Takahama | 2022-02-15 |
| 11171017 | Shutter disk | Zhang Kang, Junqi Wei, Yueh Sheng Ow, Kelvin Boh, Yuichi Wada +1 more | 2021-11-09 |
| D931241 | Lower shield for a substrate processing chamber | Ananthkrishna Jupudi, Yueh Sheng Ow, Junqi Wei, Kelvin Boh, Yuichi Wada +1 more | 2021-09-21 |
| 11043406 | Two piece shutter disk assembly with self-centering feature | Cheng-Hsiung Tsai, Ananthkrishna Jupudi | 2021-06-22 |
| D913979 | Inner shield for a substrate processing chamber | Ananthkrishna Jupudi, Yueh Sheng Ow, Junqi Wei, Kelvin Boh, Yuichi Wada +1 more | 2021-03-23 |
| 10851453 | Methods and apparatus for shutter disk assembly detection | Cheng-Hsiung Tsai, Ananthkrishna Jupudi, Eiji Asahina | 2020-12-01 |