| 12148629 |
Shutter disk |
Kang Zhang, Junqi Wei, Yueh Sheng Ow, Kelvin Boh, Yuichi Wada +1 more |
2024-11-19 |
| 12100577 |
High conductance inner shield for process chamber |
Ananthkrishna Jupudi, Yueh Sheng Ow, Junqi Wei, Kelvin Boh, Yuichi Wada +1 more |
2024-09-24 |
| 12080522 |
Preclean chamber upper shield with showerhead |
Ananthkrishna Jupudi, Yueh Sheng Ow, Junqi Wei, Kelvin Boh, Kang Zhang +1 more |
2024-09-03 |
| 11881385 |
Methods and apparatus for reducing defects in preclean chambers |
Yueh Sheng Ow, Yuichi Wada, Junqi Wei, Kang Zhang, Ananthkrishna Jupudi +2 more |
2024-01-23 |
| 11862480 |
Shutter disk |
Kang Zhang, Junqi Wei, Yueh Sheng Ow, Kelvin Boh, Yuichi Wada +1 more |
2024-01-02 |
| D973609 |
Upper shield with showerhead for a process chamber |
Ananthkrishna Jupudi, Yueh Sheng Ow, Junqi Wei, Kelvin Boh, Kang Zhang +1 more |
2022-12-27 |
| D971167 |
Lower shield for a substrate processing chamber |
Ananthkrishna Jupudi, Yueh Sheng Ow, Junqi Wei, Kelvin Boh, Yuichi Wada +1 more |
2022-11-29 |
| 11476097 |
Common electrostatic chuck for differing substrates |
Vinodh Ramachandran, Ananthkrishna Jupudi |
2022-10-18 |
| 11289357 |
Methods and apparatus for high voltage electrostatic chuck protection |
Yuichi Wada, Yueh Sheng Ow, Ananthkrishna Jupudi, Clinton GOH, Kai Liang Liew |
2022-03-29 |
| 11251028 |
Pre-clean chamber with integrated shutter garage |
Cheng-Hsiung Tsai, Ananthkrishna Jupudi, Manjunatha Koppa, Hiroyuki Takahama |
2022-02-15 |
| 11171017 |
Shutter disk |
Zhang Kang, Junqi Wei, Yueh Sheng Ow, Kelvin Boh, Yuichi Wada +1 more |
2021-11-09 |
| D931241 |
Lower shield for a substrate processing chamber |
Ananthkrishna Jupudi, Yueh Sheng Ow, Junqi Wei, Kelvin Boh, Yuichi Wada +1 more |
2021-09-21 |
| 11043406 |
Two piece shutter disk assembly with self-centering feature |
Cheng-Hsiung Tsai, Ananthkrishna Jupudi |
2021-06-22 |
| D913979 |
Inner shield for a substrate processing chamber |
Ananthkrishna Jupudi, Yueh Sheng Ow, Junqi Wei, Kelvin Boh, Yuichi Wada +1 more |
2021-03-23 |
| 10851453 |
Methods and apparatus for shutter disk assembly detection |
Cheng-Hsiung Tsai, Ananthkrishna Jupudi, Eiji Asahina |
2020-12-01 |
