Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11629409 | Inline microwave batch degas chamber | Ribhu Gautam, Ananthkrishna Jupudi, Tuck Foong Koh, Preetham Rao, Vinodh Ramachandran +3 more | 2023-04-18 |
| 11289357 | Methods and apparatus for high voltage electrostatic chuck protection | Yuichi Wada, Yueh Sheng Ow, Ananthkrishna Jupudi, Clinton GOH, Sarath Babu | 2022-03-29 |
| 10262877 | Apparatus and method for reducing substrate sliding in process chambers | Sriskantharajah Thirunavukarasu, Kirankumar Neelasandra SAVANDAIAH, Cheng-Hsiung Tsai | 2019-04-16 |
| 9595464 | Apparatus and method for reducing substrate sliding in process chambers | Sriskantharajah Thirunavukarasu, Kirankumar Neelasandra SAVANDAIAH, Cheng-Hsiung Tsai | 2017-03-14 |