Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12148629 | Shutter disk | Kang Zhang, Junqi Wei, Yueh Sheng Ow, Yuichi Wada, Ananthkrishna Jupudi +1 more | 2024-11-19 |
| 12100577 | High conductance inner shield for process chamber | Sarath Babu, Ananthkrishna Jupudi, Yueh Sheng Ow, Junqi Wei, Yuichi Wada +1 more | 2024-09-24 |
| 12080522 | Preclean chamber upper shield with showerhead | Sarath Babu, Ananthkrishna Jupudi, Yueh Sheng Ow, Junqi Wei, Kang Zhang +1 more | 2024-09-03 |
| 11913107 | Methods and apparatus for processing a substrate | Yueh Sheng Ow, Yuichi Wada, Junqi Wei, Kang Zhang | 2024-02-27 |
| 11862480 | Shutter disk | Kang Zhang, Junqi Wei, Yueh Sheng Ow, Yuichi Wada, Ananthkrishna Jupudi +1 more | 2024-01-02 |
| 11670513 | Apparatus and systems for substrate processing for lowering contact resistance | Yueh Sheng Ow, Junqi Wei, Wen Long Favier Shoo, Ananthkrishna Jupudi, Takashi Shimizu +1 more | 2023-06-06 |
| D973609 | Upper shield with showerhead for a process chamber | Sarath Babu, Ananthkrishna Jupudi, Yueh Sheng Ow, Junqi Wei, Kang Zhang +1 more | 2022-12-27 |
| D971167 | Lower shield for a substrate processing chamber | Sarath Babu, Ananthkrishna Jupudi, Yueh Sheng Ow, Junqi Wei, Yuichi Wada +1 more | 2022-11-29 |
| 11328929 | Methods, apparatuses and systems for substrate processing for lowering contact resistance | Yueh Sheng Ow, Junqi Wei, Wen Long Favier Shoo, Ananthkrishna Jupudi, Takashi Shimizu +1 more | 2022-05-10 |
| 11171017 | Shutter disk | Zhang Kang, Junqi Wei, Yueh Sheng Ow, Yuichi Wada, Ananthkrishna Jupudi +1 more | 2021-11-09 |
| D931241 | Lower shield for a substrate processing chamber | Sarath Babu, Ananthkrishna Jupudi, Yueh Sheng Ow, Junqi Wei, Yuichi Wada +1 more | 2021-09-21 |
| D913979 | Inner shield for a substrate processing chamber | Sarath Babu, Ananthkrishna Jupudi, Yueh Sheng Ow, Junqi Wei, Yuichi Wada +1 more | 2021-03-23 |