Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| D1071886 | Substrate support for a substrate processing chamber | Zhixiu Liang, Michael S. Jackson, Jiang Lu, Cheng-Hsiung Tsai, Zubin Huang | 2025-04-22 |
| 12228395 | Substrate position calibration for substrate supports in substrate processing systems | Aravind Kamath, Jallepally Ravi, Cheng-Hsiung Tsai, Hiroyuki Takahama | 2025-02-18 |
| 11201078 | Substrate position calibration for substrate supports in substrate processing systems | Aravind Kamath, Jallepally Ravi, Cheng-Hsiung Tsai, Hiroyuki Takahama | 2021-12-14 |
| 11031273 | Physical vapor deposition (PVD) electrostatic chuck with improved thermal coupling for temperature sensitive processes | Bonnie T. Chia, Ross Marshall, Cheng-Hsiung Tsai | 2021-06-08 |
| 10134615 | Substrate support with improved RF return | Aravind Kamath, Cheng-Hsiung Tsai, Jallepally Ravi, Yu Chang | 2018-11-20 |
| 9888528 | Substrate support with multiple heating zones | Jallepally Ravi, Cheng-Hsiung Tsai, Aravind Kamath, Xiaoxiong Yuan, Manjunatha Koppa | 2018-02-06 |
| 7633487 | Multichannel information processing device | Toshihiro Azami, Katsutoshi Yano, Tomonori Yasumoto | 2009-12-15 |