Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| D1071886 | Substrate support for a substrate processing chamber | Michael S. Jackson, Jiang Lu, Cheng-Hsiung Tsai, Tomoharu Matsushita, Zubin Huang | 2025-04-22 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| D1071886 | Substrate support for a substrate processing chamber | Michael S. Jackson, Jiang Lu, Cheng-Hsiung Tsai, Tomoharu Matsushita, Zubin Huang | 2025-04-22 |