Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12412774 | Tab arrangement for retaining support elements of substrate support | Pavankumar Ramanand HARAPANHALLI, Gaurav Shrivastava, Yao-Hung YANG | 2025-09-09 |
| 12125728 | Substrate carrier | Sumit Subhash Patankar, Vijay D. Parkhe, Daniel Lee Diehl, Mingwei Zhu, Hiroyuki Takahama +1 more | 2024-10-22 |
| 11610792 | Heated substrate support with thermal baffles | Sumit Subhash Patankar | 2023-03-21 |
| D904640 | Substrate carrier | Sumit Subhash Patankar, Vijay D. Parkhe, Daniel Lee Diehl, Mingwei Zhu, Hiroyuki Takahama +1 more | 2020-12-08 |