Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11764069 | Asymmetry correction via variable relative velocity of a wafer | Jimin Zhang, Brian J. Brown, Eric Lau, Ekaterina A. Mikhaylichenko, Jeonghoon Oh | 2023-09-19 |
| 11717936 | Methods for a web-based CMP system | Dmitry Sklyar, Jeonghoon Oh, Jonathan P. Domin, Steven M. Zuniga, Jay Gurusamy | 2023-08-08 |
| 9646859 | Disk-brush cleaner module with fluid jet | Hui Chen, Allen L. D'Ambra, Sen-Hou Ko, Yufei Chen, Adrian Blank +2 more | 2017-05-09 |
| 7963826 | Apparatus and methods for conditioning a polishing pad | Roy C. Nangoy, Shou-Sung Chang, Donald Olgado, Hung Chih Chen | 2011-06-21 |
| 7407433 | Pad characterization tool | Rashid Mavliev, Simon Yavelberg | 2008-08-05 |
| 7314808 | Method for sequencing substrates | Alpay Yilmaz | 2008-01-01 |
| 5402205 | Alignment system for a Half-Field Dyson projection system | David A. Markle, Hwan J. Jeong | 1995-03-28 |
| 5329332 | System for achieving a parallel relationship between surfaces of wafer and reticle of half-field dyson stepper | David A. Markle, Hwan J. Jeong | 1994-07-12 |
| 5266790 | Focusing technique suitable for use with an unpatterned specular substrate | David A. Markle, Hwan J. Jeong | 1993-11-30 |