| 10855162 |
Secondary of linear motor |
Cheng-Te Chi, Chao-Chin TENG |
2020-12-01 |
| 10610994 |
Polishing system with local area rate control and oscillation mode |
Eric Lau, King Yi Heung, Chih Chung Chou, Edwin C. Suarez, Garrett H. Sin +2 more |
2020-04-07 |
| 10434623 |
Local area polishing system and polishing pad assemblies for a polishing system |
Eric Lau, King Yi Heung, Wei-Cheng Lee, Chih Chung Chou, Edwin C. Suarez +3 more |
2019-10-08 |
| 9646859 |
Disk-brush cleaner module with fluid jet |
Allen L. D'Ambra, Sen-Hou Ko, Yufei Chen, Adrian Blank, Mario David Silvetti +2 more |
2017-05-09 |
| 9508575 |
Disk/pad clean with wafer and wafer edge/bevel clean module for chemical mechanical polishing |
Sen-Hou Ko |
2016-11-29 |
| 8407846 |
Scrubber brush with sleeve and brush mandrel for use with the scrubber brush |
Sheshraj Tulshibagwale, Hideshi TAKAHASHI, Toshikazu Tomita, Takashi Fujikawa |
2013-04-02 |
| 7044832 |
Load cup for chemical mechanical polishing |
Alpay Yilmaz, Simon Yavelberg, Toshikazu Tomita, Noel Manto, David J. Lischka +1 more |
2006-05-16 |
| 6136515 |
Method for removing photoresist in metallization process |
— |
2000-10-24 |
| 6074090 |
Electronic clinical thermometer |
— |
2000-06-13 |