Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10855162 | Secondary of linear motor | Cheng-Te Chi, Chao-Chin TENG | 2020-12-01 |
| 10610994 | Polishing system with local area rate control and oscillation mode | Eric Lau, King Yi Heung, Chih Chung Chou, Edwin C. Suarez, Garrett H. Sin +2 more | 2020-04-07 |
| 10434623 | Local area polishing system and polishing pad assemblies for a polishing system | Eric Lau, King Yi Heung, Wei-Cheng Lee, Chih Chung Chou, Edwin C. Suarez +3 more | 2019-10-08 |
| 9646859 | Disk-brush cleaner module with fluid jet | Allen L. D'Ambra, Sen-Hou Ko, Yufei Chen, Adrian Blank, Mario David Silvetti +2 more | 2017-05-09 |
| 9508575 | Disk/pad clean with wafer and wafer edge/bevel clean module for chemical mechanical polishing | Sen-Hou Ko | 2016-11-29 |
| 8407846 | Scrubber brush with sleeve and brush mandrel for use with the scrubber brush | Sheshraj Tulshibagwale, Hideshi TAKAHASHI, Toshikazu Tomita, Takashi Fujikawa | 2013-04-02 |
| 7044832 | Load cup for chemical mechanical polishing | Alpay Yilmaz, Simon Yavelberg, Toshikazu Tomita, Noel Manto, David J. Lischka +1 more | 2006-05-16 |
| 6136515 | Method for removing photoresist in metallization process | — | 2000-10-24 |
| 6074090 | Electronic clinical thermometer | — | 2000-06-13 |