Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8250695 | Roller assembly for a brush cleaning device in a cleaning module | Lakshmanan Karuppiah, Dan Zhang, Simon Yavelberg, Jim K. Atkinson, Hung Chih Chen +1 more | 2012-08-28 |
| 8101934 | Methods and apparatus for detecting a substrate notch or flat | Hui Chen, Haochuan Zhang | 2012-01-24 |
| 7044832 | Load cup for chemical mechanical polishing | Alpay Yilmaz, Simon Yavelberg, Toshikazu Tomita, Hui Chen, David J. Lischka +1 more | 2006-05-16 |