Issued Patents All Time
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11935770 | Modular mainframe layout for supporting multiple semiconductor process modules or chambers | Randy Harris, Coby Scott GROVE, Paul Z. Wirth, Avinash SHANTARAM, Amir NISSAN +1 more | 2024-03-19 |
| 11935771 | Modular mainframe layout for supporting multiple semiconductor process modules or chambers | Randy Harris, Coby Scott GROVE, Paul Z. Wirth, Avinash SHANTARAM, Amir NISSAN +3 more | 2024-03-19 |
| 10071887 | Universal component lift apparatus, assemblies, and methods for electronic device manufacturing | Jeffrey C. Hudgens | 2018-09-11 |
| 8414357 | Chemical mechanical polisher having movable slurry dispensers and method | Yulin Wang | 2013-04-09 |
| 8398458 | Modular base-plate semiconductor polisher architecture | — | 2013-03-19 |
| 8308529 | High throughput chemical mechanical polishing system | Allen L. D'Ambra | 2012-11-13 |
| 8172643 | Polishing system having a track | Allen L. D'Ambra, Jagan Rangarajan, Lakshmanan Karuppiah | 2012-05-08 |
| 7914363 | Smart conditioner rinse station | Lakshmanan Karuppiah | 2011-03-29 |
| 7611400 | Smart conditioner rinse station | Lakshmanan Karuppiah | 2009-11-03 |
| 7504018 | Electrochemical method for Ecmp polishing pad conditioning | You Wang, Stan Tsai, Lakshmanan Karuppiah, Jie Diao, Renhe Jia | 2009-03-17 |
| 7314808 | Method for sequencing substrates | Gerald Alonzo | 2008-01-01 |
| 7210981 | Smart conditioner rinse station | Lakshmanan Karuppiah | 2007-05-01 |
| 7044832 | Load cup for chemical mechanical polishing | Simon Yavelberg, Toshikazu Tomita, Hui Chen, Noel Manto, David J. Lischka +1 more | 2006-05-16 |