Issued Patents All Time
Showing 1–20 of 20 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12340979 | Semiconductor processing chamber for improved precursor flow | Tien Fak Tan, Dmitry Lubomirsky, Soonwook Jung, Soonam Park, Raymond W. Lu +1 more | 2025-06-24 |
| D1069863 | Deposition ring of a process kit for semiconductor substrate processing | Abhishek Chowdhury, Nataraj Bhaskar Rao, Harisha Sathyanarayana, Diego Ramiro Puente Sotomayor, Qanit Takmeel +2 more | 2025-04-08 |
| D1064005 | Grounding ring of a process kit for semiconductor substrate processing | Abhishek Chowdhury, Nataraj Bhaskar Rao, Harisha Sathyanarayana, Diego Ramiro Puente Sotomayor, Qanit Takmeel +2 more | 2025-02-25 |
| D1059312 | Deposition ring of a process kit for semiconductor substrate processing | Abhishek Chowdhury, Nataraj Bhaskar Rao, Harisha Sathyanarayana, Diego Ramiro Puente Sotomayor, Qanit Takmeel +2 more | 2025-01-28 |
| 12100579 | Deposition ring for thin substrate handling via edge clamping | Abhishek Chowdhury, Harisha Sathyanarayana, Nataraj Bhaskar Rao, Siqing Lu | 2024-09-24 |
| D1038049 | Cover ring for use in semiconductor processing chamber | Abhishek Chowdhury, Harisha Sathyanarayana, Siqing Lu, Nataraj Bhaskar Rao | 2024-08-06 |
| 11996315 | Thin substrate handling via edge clamping | Abhishek Chowdhury, Harisha Sathyanarayana, Siqing Lu, Nataraj Bhaskar Rao | 2024-05-28 |
| 11400560 | Retaining ring design | Jeonghoon Oh, Charles C. Garretson, Eric Lau, Andrew J. Nagengast, Steven M. Zuniga +2 more | 2022-08-02 |
| 10796922 | Systems and methods for internal surface conditioning assessment in plasma processing equipment | Soonam Park, Yufei Zhu, Nitin K. Ingle, Dmitry Lubomirsky, Jiayin Huang | 2020-10-06 |
| 10707061 | Systems and methods for internal surface conditioning in plasma processing equipment | Soonam Park, Yufei Zhu, Nitin K. Ingle, Dmitry Lubomirsky, Jiayin Huang | 2020-07-07 |
| 10610994 | Polishing system with local area rate control and oscillation mode | Eric Lau, Hui Chen, King Yi Heung, Chih Chung Chou, Garrett H. Sin +2 more | 2020-04-07 |
| 10589399 | Textured small pad for chemical mechanical polishing | Jeonghoon Oh, Jason Garcheung Fung, Eric Lau, King Yi Heung, Ashwin CHOCKALINGAM +3 more | 2020-03-17 |
| 10593523 | Systems and methods for internal surface conditioning in plasma processing equipment | Soonam Park, Yufei Zhu, Nitin K. Ingle, Dmitry Lubomirsky, Jiayin Huang | 2020-03-17 |
| 10490418 | Systems and methods for internal surface conditioning assessment in plasma processing equipment | Soonam Park, Yufei Zhu, Nitin K. Ingle, Dmitry Lubomirsky, Jiayin Huang | 2019-11-26 |
| 10434623 | Local area polishing system and polishing pad assemblies for a polishing system | Eric Lau, Hui Chen, King Yi Heung, Wei-Cheng Lee, Chih Chung Chou +3 more | 2019-10-08 |
| 9966240 | Systems and methods for internal surface conditioning assessment in plasma processing equipment | Soonam Park, Yufei Zhu, Nitin K. Ingle, Dmitry Lubomirsky, Jiayin Huang | 2018-05-08 |
| 9850576 | Anti-arc zero field plate | Jonghoon Baek, Tsutomu Tanaka, Edward P. Hammond, IV, Jeonghoon Oh | 2017-12-26 |
| 9355922 | Systems and methods for internal surface conditioning in plasma processing equipment | Soonam Park, Yufei Zhu, Nitin K. Ingle, Dmitry Lubomirsky, Jiayin Huang | 2016-05-31 |
| D600956 | Machine cabinet | — | 2009-09-29 |
| 6830624 | Blocker plate by-pass for remote plasma clean | Karthik Janakiraman | 2004-12-14 |