| 12340979 |
Semiconductor processing chamber for improved precursor flow |
Tien Fak Tan, Dmitry Lubomirsky, Soonwook Jung, Soonam Park, Raymond W. Lu +1 more |
2025-06-24 |
|
| D1069863 |
Deposition ring of a process kit for semiconductor substrate processing |
Abhishek Chowdhury, Nataraj Bhaskar Rao, Harisha Sathyanarayana, Diego Ramiro Puente Sotomayor, Qanit Takmeel +2 more |
2025-04-08 |
|
| D1064005 |
Grounding ring of a process kit for semiconductor substrate processing |
Abhishek Chowdhury, Nataraj Bhaskar Rao, Harisha Sathyanarayana, Diego Ramiro Puente Sotomayor, Qanit Takmeel +2 more |
2025-02-25 |
|
| D1059312 |
Deposition ring of a process kit for semiconductor substrate processing |
Abhishek Chowdhury, Nataraj Bhaskar Rao, Harisha Sathyanarayana, Diego Ramiro Puente Sotomayor, Qanit Takmeel +2 more |
2025-01-28 |
|
| 12100579 |
Deposition ring for thin substrate handling via edge clamping |
Abhishek Chowdhury, Harisha Sathyanarayana, Nataraj Bhaskar Rao, Siqing Lu |
2024-09-24 |
$100,019,000 |
| D1038049 |
Cover ring for use in semiconductor processing chamber |
Abhishek Chowdhury, Harisha Sathyanarayana, Siqing Lu, Nataraj Bhaskar Rao |
2024-08-06 |
|
| 11996315 |
Thin substrate handling via edge clamping |
Abhishek Chowdhury, Harisha Sathyanarayana, Siqing Lu, Nataraj Bhaskar Rao |
2024-05-28 |
$67,076,000 |
| 11400560 |
Retaining ring design |
Jeonghoon Oh, Charles C. Garretson, Eric Lau, Andrew J. Nagengast, Steven M. Zuniga +2 more |
2022-08-02 |
$46,822,000 |
| 10796922 |
Systems and methods for internal surface conditioning assessment in plasma processing equipment |
Soonam Park, Yufei Zhu, Nitin K. Ingle, Dmitry Lubomirsky, Jiayin Huang |
2020-10-06 |
$62,697,000 |
| 10707061 |
Systems and methods for internal surface conditioning in plasma processing equipment |
Soonam Park, Yufei Zhu, Nitin K. Ingle, Dmitry Lubomirsky, Jiayin Huang |
2020-07-07 |
$29,619,000 |
| 10610994 |
Polishing system with local area rate control and oscillation mode |
Eric Lau, Hui Chen, King Yi Heung, Chih Chung Chou, Garrett H. Sin +2 more |
2020-04-07 |
$24,481,000 |
| 10593523 |
Systems and methods for internal surface conditioning in plasma processing equipment |
Soonam Park, Yufei Zhu, Nitin K. Ingle, Dmitry Lubomirsky, Jiayin Huang |
2020-03-17 |
$17,260,000 |
| 10589399 |
Textured small pad for chemical mechanical polishing |
Jeonghoon Oh, Jason Garcheung Fung, Eric Lau, King Yi Heung, Ashwin CHOCKALINGAM +3 more |
2020-03-17 |
$17,260,000 |
| 10490418 |
Systems and methods for internal surface conditioning assessment in plasma processing equipment |
Soonam Park, Yufei Zhu, Nitin K. Ingle, Dmitry Lubomirsky, Jiayin Huang |
2019-11-26 |
$24,423,000 |
| 10434623 |
Local area polishing system and polishing pad assemblies for a polishing system |
Eric Lau, Hui Chen, King Yi Heung, Wei-Cheng Lee, Chih Chung Chou +3 more |
2019-10-08 |
$26,143,000 |
| 9966240 |
Systems and methods for internal surface conditioning assessment in plasma processing equipment |
Soonam Park, Yufei Zhu, Nitin K. Ingle, Dmitry Lubomirsky, Jiayin Huang |
2018-05-08 |
$79,246,000 |
| 9850576 |
Anti-arc zero field plate |
Jonghoon Baek, Tsutomu Tanaka, Edward P. Hammond, IV, Jeonghoon Oh |
2017-12-26 |
$19,032,000 |
| 9355922 |
Systems and methods for internal surface conditioning in plasma processing equipment |
Soonam Park, Yufei Zhu, Nitin K. Ingle, Dmitry Lubomirsky, Jiayin Huang |
2016-05-31 |
$8,928,000 |
| D600956 |
Machine cabinet |
— |
2009-09-29 |
|
| 6830624 |
Blocker plate by-pass for remote plasma clean |
Karthik Janakiraman |
2004-12-14 |
$24,616,000 |
