Issued Patents All Time
Showing 1–25 of 25 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12431360 | Selective etching between silicon-and-germanium-containing materials with varying germanium concentrations | Zihui Li, Anchuan Wang, Nitin K. Ingle | 2025-09-30 |
| 12394631 | Selective etching of silicon-and-germanium-containing materials with increased surface purities | Zihui Li, Yi Jin, Anchuan Wang, Nitin K. Ingle | 2025-08-19 |
| 12202754 | Porous biological polymerizing agent for sediment dewatering in the environmental dredging of rivers and lakes, and method of its preparation and use | Baoan Hu, Xianfeng Dong | 2025-01-21 |
| 11291127 | Hand controller | Hongbin Lu, Jinyi Li, Enjie Ruan, Xingliang Chen | 2022-03-29 |
| 10796922 | Systems and methods for internal surface conditioning assessment in plasma processing equipment | Soonam Park, Yufei Zhu, Edwin C. Suarez, Nitin K. Ingle, Dmitry Lubomirsky | 2020-10-06 |
| 10707061 | Systems and methods for internal surface conditioning in plasma processing equipment | Soonam Park, Yufei Zhu, Edwin C. Suarez, Nitin K. Ingle, Dmitry Lubomirsky | 2020-07-07 |
| 10593523 | Systems and methods for internal surface conditioning in plasma processing equipment | Soonam Park, Yufei Zhu, Edwin C. Suarez, Nitin K. Ingle, Dmitry Lubomirsky | 2020-03-17 |
| 10490418 | Systems and methods for internal surface conditioning assessment in plasma processing equipment | Soonam Park, Yufei Zhu, Edwin C. Suarez, Nitin K. Ingle, Dmitry Lubomirsky | 2019-11-26 |
| 10319603 | Selective SiN lateral recess | Zhijun Chen, Anchuan Wang, Nitin K. Ingle | 2019-06-11 |
| 10283324 | Oxygen treatment for nitride etching | Zhijun Chen, Anchuan Wang | 2019-05-07 |
| 10204795 | Flow distribution plate for surface fluorine reduction | Lin Xu, Zhijun Chen, Anchuan Wang | 2019-02-12 |
| 10186428 | Removal methods for high aspect ratio structures | Lin Xu, Zhijun Chen, Anchuan Wang | 2019-01-22 |
| 10128086 | Silicon pretreatment for nitride removal | Zhijun Chen, Anchuan Wang, Nitin K. Ingle | 2018-11-13 |
| 10062579 | Selective SiN lateral recess | Zhijun Chen, Anchuan Wang, Nitin K. Ingle | 2018-08-28 |
| 9991134 | Processing systems and methods for halide scavenging | Anchuan Wang, Xinglong Chen, Zihui Li, Hiroshi Hamana, Zhijun Chen +5 more | 2018-06-05 |
| 9966240 | Systems and methods for internal surface conditioning assessment in plasma processing equipment | Soonam Park, Yufei Zhu, Edwin C. Suarez, Nitin K. Ingle, Dmitry Lubomirsky | 2018-05-08 |
| 9768034 | Removal methods for high aspect ratio structures | Lin Xu, Zhijun Chen, Anchuan Wang | 2017-09-19 |
| 9704723 | Processing systems and methods for halide scavenging | Anchuan Wang, Xinglong Chen, Zihui Li, Hiroshi Hamana, Zhijun Chen +5 more | 2017-07-11 |
| 9659792 | Processing systems and methods for halide scavenging | Anchuan Wang, Xinglong Chen, Zihui Li, Hiroshi Hamana, Zhijun Chen +5 more | 2017-05-23 |
| 9449850 | Processing systems and methods for halide scavenging | Anchuan Wang, Xinglong Chen, Zihui Li, Hiroshi Hamana, Zhijun Chen +5 more | 2016-09-20 |
| 9355922 | Systems and methods for internal surface conditioning in plasma processing equipment | Soonam Park, Yufei Zhu, Edwin C. Suarez, Nitin K. Ingle, Dmitry Lubomirsky | 2016-05-31 |
| 9184055 | Processing systems and methods for halide scavenging | Anchuan Wang, Xinglong Chen, Zihui Li, Hiroshi Hamana, Zhijun Chen +5 more | 2015-11-10 |
| 9153442 | Processing systems and methods for halide scavenging | Anchuan Wang, Xinglong Chen, Zihui Li, Hiroshi Hamana, Zhijun Chen +5 more | 2015-10-06 |
| 9093371 | Processing systems and methods for halide scavenging | Anchuan Wang, Xinglong Chen, Zihui Li, Hiroshi Hamana, Zhijun Chen +5 more | 2015-07-28 |
| 9023732 | Processing systems and methods for halide scavenging | Anchuan Wang, Xinglong Chen, Zihui Li, Hiroshi Hamana, Zhijun Chen +5 more | 2015-05-05 |