In-situ conditioner disk cleaning during CMP

Assignee

• Applied Materials

Inventors

• Hailin Wu (5 patents)
• Shih-Chiehmr Chang (5 patents)
• Unknown
• Jeong-Il Oh (10 patents)
• Chad Pollard (8 patents)
• Chih-Che Chou (4 patents)
• Ningzhuo Cui (3 patents)
• Hui Chen (4 patents)

View full patent text on Google Patents →