Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12403561 | Eddy current monitoring to detect vibration in polishing | Kun Xu, Patrick A. Higashi, Hassan G. Iravani, Harry Q. Lee, Haosheng Wu +4 more | 2025-09-02 |
| 8393933 | Polishing pad and system with window support | Jun Qian, Dominic J. Benvegnu, Boguslaw A. Swedek, Thomas H. Osterheld | 2013-03-12 |