Issued Patents All Time
Showing 1–20 of 20 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12403561 | Eddy current monitoring to detect vibration in polishing | Kun Xu, Patrick A. Higashi, Harry Q. Lee, Haosheng Wu, Eric T. Wu +4 more | 2025-09-02 |
| 12103135 | Core configuration for in-situ electromagnetic induction monitoring system | Kun Xu, Denis Ivanov, Shih-Haur Shen, Boguslaw A. Swedek | 2024-10-01 |
| 11638982 | Core configuration for in-situ electromagnetic induction monitoring system | Kun Xu, Denis Ivanov, Shih-Haur Shen, Boguslaw A. Swedek | 2023-05-02 |
| 11004708 | Core configuration with alternating posts for in-situ electromagnetic induction monitoring system | Boguslaw A. Swedek, Tzu-Yu Liu, Kun Xu, Shih-Haur Shen | 2021-05-11 |
| 10994389 | Polishing apparatus using neural network for monitoring | Kun Xu, Denis Ivanov, Boguslaw A. Swedek, Shih-Haur Shen, Harry Q. Lee +1 more | 2021-05-04 |
| 10741459 | Inductive monitoring of conductive loops | Wei Lu, Zhefu Wang, Zhihong Wang, Dominic J. Benvegnu, Ingemar Carlsson +2 more | 2020-08-11 |
| 10556315 | Determination of gain for eddy current sensor | Kun Xu, Shih-Haur Shen, Boguslaw A. Swedek, Ingemar Carlsson, Doyle E. Bennett +2 more | 2020-02-11 |
| 10391610 | Core configuration for in-situ electromagnetic induction monitoring system | Kun Xu, Denis Ivanov, Shih-Haur Shen, Boguslaw A. Swedek | 2019-08-27 |
| 10207386 | Determination of gain for eddy current sensor | Kun Xu, Shih-Haur Shen, Boguslaw A. Swedek, Ingemar Carlsson, Doyle E. Bennett +2 more | 2019-02-19 |
| 10199281 | Substrate features for inductive monitoring of conductive trench depth | Wei Lu, Zhihong Wang, Wen-Chiang Tu, Zhefu Wang, Boguslaw A. Swedek +2 more | 2019-02-05 |
| 10103073 | Inductive monitoring of conductive trench depth | Wei Lu, Zhefu Wang, Zhihong Wang, Dominic J. Benvegnu, Ingemar Carlsson +2 more | 2018-10-16 |
| 9911664 | Substrate features for inductive monitoring of conductive trench depth | Wei Lu, Zhihong Wang, Wen-Chiang Tu, Zhefu Wang, Boguslaw A. Swedek +2 more | 2018-03-06 |
| 9754846 | Inductive monitoring of conductive trench depth | Wei Lu, Zhefu Wang, Zhihong Wang, Dominic J. Benvegnu, Ingemar Carlsson +2 more | 2017-09-05 |
| 9636797 | Adjusting eddy current measurements | Kun Xu, Ingemar Carlsson, Boguslaw A. Swedek, Doyle E. Bennett, Shih-Haur Shen +2 more | 2017-05-02 |
| 9281253 | Determination of gain for eddy current sensor | Kun Xu, Shih-Haur Shen, Boguslaw A. Swedek, Ingemar Carlsson, Doyle E. Bennett +2 more | 2016-03-08 |
| 9275917 | Determination of gain for eddy current sensor | Kun Xu, Shih-Haur Shen, Boguslaw A. Swedek, Ingemar Carlsson, Doyle E. Bennett +2 more | 2016-03-01 |
| 9205527 | In-situ monitoring system with monitoring of elongated region | Kun Xu, Shih-Haur Shen, Tzu-Yu Liu, Ingemar Carlsson, Boguslaw A. Swedek +2 more | 2015-12-08 |
| 9023667 | High sensitivity eddy current monitoring system | Kun Xu, Boguslaw A. Swedek, Ingemar Carlsson, Shih-Haur Shen, Wen-Chiang Tu | 2015-05-05 |
| 8284560 | Eddy current sensor with enhanced edge resolution | Ingemar Carlsson, Boguslaw A. Swedek | 2012-10-09 |
| 5847370 | Can coating and curing system having focused induction heater using thin lamination cores | David L. Sluka, Robert A. Sprenger | 1998-12-08 |