Control of steam generation for chemical mechanical polishing

Assignee

• Applied Materials

Inventors

• Hari Soundararajan (21 patents)
• Shou-Sung Chang (64 patents)
• Calvin Spencer Lee (26 patents)
• Jonathan P. Domin (6 patents)
• Shuchivrat Datar (2 patents)
• Dmitry Sklyar (4 patents)
• Paul D. Butterfield (51 patents)
• Chad Pollard (8 patents)
• Haosheng Wu (25 patents)

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