Issued Patents All Time
Showing 25 most recent of 50 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12392427 | Insulated fluid lines in chemical mechanical polishing | Chad Pollard, Hari Soundararajan, Shou-Sung Chang, Haosheng Wu, Calvin Spencer Lee +1 more | 2025-08-19 |
| 12030093 | Steam treatment stations for chemical mechanical polishing system | Haosheng Wu, Jianshe Tang, Hari Soundararajan, Shou-Sung Chang, Hui Chen +2 more | 2024-07-09 |
| 11986926 | Slurry distribution device for chemical mechanical polishing | Yen-Chu Yang, Stephen Jew, Jianshe Tang, Haosheng Wu, Shou-Sung Chang +2 more | 2024-05-21 |
| 11833637 | Control of steam generation for chemical mechanical polishing | Hari Soundararajan, Shou-Sung Chang, Calvin Spencer Lee, Jonathan P. Domin, Shuchivrat Datar +3 more | 2023-12-05 |
| 11806835 | Slurry distribution device for chemical mechanical polishing | Yen-Chu Yang, Stephen Jew, Jianshe Tang, Haosheng Wu, Shou-Sung Chang +2 more | 2023-11-07 |
| 11780046 | Polishing system with annular platen or polishing pad | Thomas H. Osterheld, Jeonghoon Oh, Shou-Sung Chang, Steven M. Zuniga, Fred C. Redeker | 2023-10-10 |
| 11633833 | Use of steam for pre-heating of CMP components | Haosheng Wu, Jianshe Tang, Hari Soundararajan, Shou-Sung Chang, Hui Chen +2 more | 2023-04-25 |
| 11628478 | Steam cleaning of CMP components | Haosheng Wu, Jianshe Tang, Hari Soundararajan, Shou-Sung Chang, Hui Chen +2 more | 2023-04-18 |
| 11511388 | Polishing system with support post and annular platen or polishing pad | Thomas H. Osterheld, Jeonghoon Oh, Shou-Sung Chang, Steven M. Zuniga, Fred C. Redeker | 2022-11-29 |
| 11446711 | Steam treatment stations for chemical mechanical polishing system | Haosheng Wu, Jianshe Tang, Hari Soundararajan, Shou-Sung Chang, Hui Chen +2 more | 2022-09-20 |
| 11077536 | Slurry distribution device for chemical mechanical polishing | Yen-Chu Yang, Stephen Jew, Jianshe Tang, Haosheng Wu, Shou-Sung Chang +2 more | 2021-08-03 |
| 10967483 | Slurry distribution device for chemical mechanical polishing | Yen-Chu Yang, Stephen Jew, Jianshe Tang, Haosheng Wu, Shou-Sung Chang +2 more | 2021-04-06 |
| 10562147 | Polishing system with annular platen or polishing pad for substrate monitoring | Thomas H. Osterheld, Jeonghoon Oh, Shou-Sung Chang, Steven M. Zuniga, Fred C. Redeker | 2020-02-18 |
| 10076817 | Orbital polishing with small pad | Hung Chih Chen, Jay Gurusamy, Jason Garcheung Fung, Shou-Sung Chang, Jimin Zhang +1 more | 2018-09-18 |
| 9862070 | Systems and methods for substrate polishing end point detection using improved friction measurement | Shou-Sung Chang, Hung Chih Chen, Lakshmanan Karuppiah, Erik S. Rondum | 2018-01-09 |
| 9808906 | Polishing system with front side pressure control | Shou-Sung Chang, Takashi Fujikawa, Hung Chih Chen | 2017-11-07 |
| 9687960 | Polishing pad cleaning systems employing fluid outlets oriented to direct fluid under spray bodies and towards inlet ports, and related methods | Shou-Sung Chang, Bum Jick Kim | 2017-06-27 |
| 9452506 | Vacuum cleaning systems for polishing pads, and related methods | Shou-Sung Chang, Bum Jick Kim | 2016-09-27 |
| 9358658 | Polishing system with front side pressure control | Shou-Sung Chang, Takashi Fujikawa, Hung Chih Chen | 2016-06-07 |
| 9308623 | Multi-disk chemical mechanical polishing pad conditioners and methods | Hung Chih Chen, Shou-Sung Chang, Jason Garcheung Fung, Matthew A. Gallelli, Kevin Chou | 2016-04-12 |
| 9061394 | Systems and methods for substrate polishing end point detection using improved friction measurement | Shou-Sung Chang, Hung Chih Chen, Lakshmanan Karuppiah, Erik S. Rondum | 2015-06-23 |
| 8142260 | Methods and apparatus for removal of films and flakes from the edge of both sides of a substrate using backing pads | Eashwer Chandra Vidhya Sagar Kollata, Shou-Sung Chang, Zhenhua Zhang, Sen-Hou Ko, Antoine P. Manens +2 more | 2012-03-27 |
| 7828626 | Apparatus for conditioning processing pads | Sen-Hou Ko | 2010-11-09 |
| 7678245 | Method and apparatus for electrochemical mechanical processing | Yan Wang, Siew Neo, Feng Q. Liu, Stan Tsai, Yongqi Hu +9 more | 2010-03-16 |
| 7666061 | Method for conditioning processing pads | Sen-Hou Ko | 2010-02-23 |