Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12076877 | Polishing platens and polishing platen manufacturing methods | Danielle Loi, Jay Gurusamy, Steven M. Zuniga | 2024-09-03 |
| 11986926 | Slurry distribution device for chemical mechanical polishing | Yen-Chu Yang, Stephen Jew, Jianshe Tang, Haosheng Wu, Shou-Sung Chang +2 more | 2024-05-21 |
| 11806835 | Slurry distribution device for chemical mechanical polishing | Yen-Chu Yang, Stephen Jew, Jianshe Tang, Haosheng Wu, Shou-Sung Chang +2 more | 2023-11-07 |
| 11389925 | Offset head-spindle for chemical mechanical polishing | Steven M. Zuniga, Jay Gurusamy, Danielle Loi | 2022-07-19 |
| 11077536 | Slurry distribution device for chemical mechanical polishing | Yen-Chu Yang, Stephen Jew, Jianshe Tang, Haosheng Wu, Shou-Sung Chang +2 more | 2021-08-03 |
| 10967483 | Slurry distribution device for chemical mechanical polishing | Yen-Chu Yang, Stephen Jew, Jianshe Tang, Haosheng Wu, Shou-Sung Chang +2 more | 2021-04-06 |
| 10350728 | System and process for in situ byproduct removal and platen cooling during CMP | Jie Diao, Erik S. Rondum, Thomas Li, Christopher Heung-Gyun Lee | 2019-07-16 |
| 9687960 | Polishing pad cleaning systems employing fluid outlets oriented to direct fluid under spray bodies and towards inlet ports, and related methods | Paul D. Butterfield, Shou-Sung Chang | 2017-06-27 |
| 9452506 | Vacuum cleaning systems for polishing pads, and related methods | Paul D. Butterfield, Shou-Sung Chang | 2016-09-27 |