Slurry distribution device for chemical mechanical polishing

Assignee

• Applied Materials

Inventors

• Yen-Chu Yang (6 patents)
• Stephen Jew (15 patents)
• Jianshe Tang (49 patents)
• Haosheng Wu (25 patents)
• Shou-Sung Chang (64 patents)
• Paul D. Butterfield (51 patents)
• Alexander John Fisher (8 patents)
• Bum Jick Kim (9 patents)

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