Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12030093 | Steam treatment stations for chemical mechanical polishing system | Haosheng Wu, Jianshe Tang, Hari Soundararajan, Shou-Sung Chang, Hui Chen +2 more | 2024-07-09 |
| 11986926 | Slurry distribution device for chemical mechanical polishing | Yen-Chu Yang, Stephen Jew, Jianshe Tang, Haosheng Wu, Shou-Sung Chang +2 more | 2024-05-21 |
| 11806835 | Slurry distribution device for chemical mechanical polishing | Yen-Chu Yang, Stephen Jew, Jianshe Tang, Haosheng Wu, Shou-Sung Chang +2 more | 2023-11-07 |
| 11633833 | Use of steam for pre-heating of CMP components | Haosheng Wu, Jianshe Tang, Hari Soundararajan, Shou-Sung Chang, Paul D. Butterfield +2 more | 2023-04-25 |
| 11628478 | Steam cleaning of CMP components | Haosheng Wu, Jianshe Tang, Hari Soundararajan, Shou-Sung Chang, Hui Chen +2 more | 2023-04-18 |
| 11446711 | Steam treatment stations for chemical mechanical polishing system | Haosheng Wu, Jianshe Tang, Hari Soundararajan, Shou-Sung Chang, Hui Chen +2 more | 2022-09-20 |
| 11077536 | Slurry distribution device for chemical mechanical polishing | Yen-Chu Yang, Stephen Jew, Jianshe Tang, Haosheng Wu, Shou-Sung Chang +2 more | 2021-08-03 |
| 10967483 | Slurry distribution device for chemical mechanical polishing | Yen-Chu Yang, Stephen Jew, Jianshe Tang, Haosheng Wu, Shou-Sung Chang +2 more | 2021-04-06 |