Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12214468 | Temperature control of chemical mechanical polishing | Haosheng Wu, Hari Soundararajan, Jianshe Tang, Shou-Sung Chang, Shih-Haur Shen +1 more | 2025-02-04 |
| 11986926 | Slurry distribution device for chemical mechanical polishing | Stephen Jew, Jianshe Tang, Haosheng Wu, Shou-Sung Chang, Paul D. Butterfield +2 more | 2024-05-21 |
| 11897079 | Low-temperature metal CMP for minimizing dishing and corrosion, and improving pad asperity | Haosheng Wu, Hari Soundararajan, Jianshe Tang, Shou-Sung Chang, Brian J. Brown +2 more | 2024-02-13 |
| 11806835 | Slurry distribution device for chemical mechanical polishing | Stephen Jew, Jianshe Tang, Haosheng Wu, Shou-Sung Chang, Paul D. Butterfield +2 more | 2023-11-07 |
| 11077536 | Slurry distribution device for chemical mechanical polishing | Stephen Jew, Jianshe Tang, Haosheng Wu, Shou-Sung Chang, Paul D. Butterfield +2 more | 2021-08-03 |
| 10967483 | Slurry distribution device for chemical mechanical polishing | Stephen Jew, Jianshe Tang, Haosheng Wu, Shou-Sung Chang, Paul D. Butterfield +2 more | 2021-04-06 |