Issued Patents All Time
Showing 26–50 of 52 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9524896 | Apparatus and methods for transporting and processing substrates | Kevin Fairbairn, Michael Barnes, Christopher T. Lane | 2016-12-20 |
| 9502276 | System architecture for vacuum processing | Vinay Shah, Alex Riposan | 2016-11-22 |
| 9324598 | Substrate processing system and method | Terry Pederson, Henry Hieslmair, Moon Chun, Vinay Prabhakar, Babak Adibi | 2016-04-26 |
| 9165587 | System and method for dual-sided sputter etch of substrates | Michael Barnes | 2015-10-20 |
| 9157145 | Processing tool with combined sputter and evaporation deposition sources | D. Guy Eristoff, Michael Barnes, Arthur C. Wall | 2015-10-13 |
| 8998553 | High throughput load lock for solar wafers | Vinay Shah, William Eugene Runstadler, Jr., Kevin Fairbairn, Richard Cooke | 2015-04-07 |
| 8992153 | System and method for substrate transport | Stuart Scollay, Xiang Chen | 2015-03-31 |
| 8795466 | System and method for processing substrates with detachable mask | Michael Barnes | 2014-08-05 |
| 8784622 | System and method for dual-sided sputter etch of substrates | Michael Barnes | 2014-07-22 |
| 8677929 | Method and apparatus for masking solar cell substrates for deposition | Alexander Berger, Vinay Shah, Judy H. Huang, Karthik Janakiraman, Chau Nguyen +1 more | 2014-03-25 |
| 8419341 | Linear vacuum robot with Z motion and articulated arm | Gee Sun Hoey, Hoang Huy Vu, Jimin Ryu | 2013-04-16 |
| 8363378 | Method for optimized removal of wafer from electrostatic chuck | Hizam Sahibudeen, Dennis S. Grimard | 2013-01-29 |
| 8354001 | Processing thin wafers | Stuart Scollay, Edric Tong | 2013-01-15 |
| 8349196 | System and method for commercial fabrication of patterned media | Kevin Fairbairn, Michael Barnes, Ren Xu, Charles Liu, Ralph Kerns | 2013-01-08 |
| 8303764 | Apparatus and methods for transporting and processing substrates | Kevin Fairbairn, Michael Barnes, Christopher T. Lane | 2012-11-06 |
| 8293066 | Apparatus and methods for transporting and processing substrates | Kevin Fairbairn, Michael Barnes, Christopher T. Lane | 2012-10-23 |
| 8206551 | Processing thin wafers | Stuart Scollay, Edric Tong | 2012-06-26 |
| 8114339 | Method of and apparatus utilizing carbon cord for evaporation of metals | Arthur C. Wall | 2012-02-14 |
| 8087380 | Evaporative system for solar cell fabrication | Michael Barnes, Kevin Fairbairn | 2012-01-03 |
| 7901539 | Apparatus and methods for transporting and processing substrates | Kevin Fairbairn, Michael Barnes, Christopher T. Lane | 2011-03-08 |
| 7611322 | Processing thin wafers | Stuart Scollay, Edric Tong | 2009-11-03 |
| 6919001 | Disk coating system | Kevin Fairbairn, Craig Marion, Robert E. Weiss | 2005-07-19 |
| 6517691 | Substrate processing system | John Les Hughes, Eric C. Lawson, Tatsuru Tanaka | 2003-02-11 |
| 6368678 | Plasma processing system and method | James Rogers | 2002-04-09 |
| 6228429 | Methods and apparatus for processing insulating substrates | James Rogers, Jun Xie, Eric C. Lawson | 2001-05-08 |