Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8677929 | Method and apparatus for masking solar cell substrates for deposition | Alexander Berger, Terry Bluck, Vinay Shah, Judy H. Huang, Karthik Janakiraman +1 more | 2014-03-25 |
| 6616973 | Liquid phosphorous precursor delivery apparatus | Visweswaren Sivaramakrishnan | 2003-09-09 |
| 6354241 | Heated electrostatic particle trap for in-situ vacuum line cleaning of a substrated processing | Tsutomu Tanaka, Hari Ponnekanti, Kevin Fairbairn, Sebastien Raoux, Mark Fodor | 2002-03-12 |
| 6163007 | Microwave plasma generating apparatus with improved heat protection of sealing O-rings | Tsutomu Tanaka, Thomas Nowak, Hari Ponnekanti, Kevin Fairbairn | 2000-12-19 |
| 5925189 | Liquid phosphorous precursor delivery apparatus | Visweswaren Sivaramakrishnan | 1999-07-20 |