Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6951826 | Silicon carbide deposition for use as a low dielectric constant anti-reflective coating | Christopher Dennis Bencher, Joe Feng, Mei-Yee Shek, Judy H. Huang | 2005-10-04 |
| 6635583 | Silicon carbide deposition for use as a low-dielectric constant anti-reflective coating | Christopher Dennis Bencher, Joe Feng, Mei-Yee Shek, Judy H. Huang | 2003-10-21 |
| 6451686 | Control of semiconductor device isolation properties through incorporation of fluorine in peteos films | Joel Glenn, Mei-Yee Shek, Judy H. Huang | 2002-09-17 |
| 6365518 | Method of processing a substrate in a processing chamber | Albert Lee, Christopher Dennis Bencher, Tom Nowak | 2002-04-02 |