Issued Patents All Time
Showing 51–54 of 54 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6077764 | Process for depositing high deposition rate halogen-doped silicon oxide layer | Dian Sugiarto, David Cheung | 2000-06-20 |
| 5968324 | Method and apparatus for depositing antireflective coating | David Cheung, Joe Feng, Wai-Fan Yau | 1999-10-19 |
| 5908672 | Method and apparatus for depositing a planarized passivation layer | Choon Kun Ryu, David Cheung | 1999-06-01 |
| 5792269 | Gas distribution for CVD systems | Thomas E. Deacon, David Cheung, Peter Wai-Man Lee | 1998-08-11 |