Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9245793 | Plasma treatment of low-K surface to improve barrier deposition | Ratsamee Limdulpaiboon, Frank Greer, Chi-I Lang, J. Watanabe | 2016-01-26 |
| 9224783 | Plasma densification of dielectrics for improved dielectric loss tangent | Frank Greer, Andy Steinbach | 2015-12-29 |
| 7476621 | Halogen-free noble gas assisted H2 plasma etch process in deposition-etch-deposition gap fill | Minh Anh Nguyen, Chi-I Lang, Judy H. Huang | 2009-01-13 |
| 7344996 | Helium-based etch process in deposition-etch-deposition gap fill | Chi-I Lang, Ratsamee Limdulpaiboon, Judy H. Huang | 2008-03-18 |
| 7211525 | Hydrogen treatment enhanced gap fill | Sunil Shanker, Sean Cox, Chi-I Lang, Judy H. Huang, Minh Anh Nguyen +1 more | 2007-05-01 |
| 7163896 | Biased H2 etch process in deposition-etch-deposition gap fill | Jengyi Yu, Siswanto Sutanto, Pingsheng Sun, Jeffrey Chih-Hou Lowe, Waikit Fung +1 more | 2007-01-16 |
| 7078312 | Method for controlling etch process repeatability | Siswanto Sutanto, Waikit Fung, Mayasari Lim, Vishal Gauri, George D. Papasouliotis | 2006-07-18 |
| 6844612 | Low dielectric constant fluorine-doped silica glass film for use in integrated circuit chips and method of forming the same | Jason Tian, M. Ziaul Karim, Cong-Thanh DO | 2005-01-18 |
| 6452129 | Plasma torch preventing gas backflows into the torch | Richard C. Eschenbach, Robin A. Lampson, John R. Sparkes | 2002-09-17 |