Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7217658 | Process modulation to prevent structure erosion during gap fill | Atiye Bayman, George D. Papasouliotis, Yong Ling, Weijie Zhang, Vishal Gauri | 2007-05-15 |
| 7078312 | Method for controlling etch process repeatability | Siswanto Sutanto, Wenxian Zhu, Waikit Fung, Vishal Gauri, George D. Papasouliotis | 2006-07-18 |