Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7217658 | Process modulation to prevent structure erosion during gap fill | George D. Papasouliotis, Yong Ling, Weijie Zhang, Vishal Gauri, Mayasari Lim | 2007-05-15 |
| 7176039 | Dynamic modification of gap fill process characteristics | George D. Papasouliotis | 2007-02-13 |
| 7067440 | Gap fill for high aspect ratio structures | Md Sazzadur Rahman, Weijie Zhang, Bart J. van Schravendijk, Vishal Gauri, George D. Papasouliotis +1 more | 2006-06-27 |
| 6787483 | Gap fill for high aspect ratio structures | Md Sazzadur Rahman, Weijie Zhang, Bart Van Schravendijk, Vishal Gauri, George D. Papasoulitotis +1 more | 2004-09-07 |
| 6596654 | Gap fill for high aspect ratio structures | Md Sazzadur Rahman, Weijie Zhang, Bart J. van Schravendijk, Vishal Gauri, George D. Papasoulitotis +1 more | 2003-07-22 |
| 5188971 | Process for making a self-aligned bipolar sinker structure | Larry J. Pollock | 1993-02-23 |
| 5001538 | Bipolar sinker structure and process for forming same | Larry J. Pollock | 1991-03-19 |
| 4468285 | Plasma etch process for single-crystal silicon with improved selectivity to silicon dioxide | Mammen Thomas | 1984-08-28 |
| 4456501 | Process for dislocation-free slot isolations in device fabrication | Mammen Thomas | 1984-06-26 |