Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10395944 | Pulsing RF power in etch process to enhance tungsten gapfill performance | Liang Meng, Anand Chandrashekar | 2019-08-27 |
| 9978610 | Pulsing RF power in etch process to enhance tungsten gapfill performance | Liang Meng, Anand Chandrashekar | 2018-05-22 |
| 7163896 | Biased H2 etch process in deposition-etch-deposition gap fill | Wenxian Zhu, Jengyi Yu, Siswanto Sutanto, Pingsheng Sun, Jeffrey Chih-Hou Lowe +1 more | 2007-01-16 |
| 7078312 | Method for controlling etch process repeatability | Siswanto Sutanto, Wenxian Zhu, Mayasari Lim, Vishal Gauri, George D. Papasouliotis | 2006-07-18 |
| 7064087 | Phosphorous-doped silicon dioxide process to customize contact etch profiles | Michael D. Turner, Oliver Graudejus, Doug Winandy | 2006-06-20 |