Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7163896 | Biased H2 etch process in deposition-etch-deposition gap fill | Wenxian Zhu, Jengyi Yu, Pingsheng Sun, Jeffrey Chih-Hou Lowe, Waikit Fung +1 more | 2007-01-16 |
| 7078312 | Method for controlling etch process repeatability | Wenxian Zhu, Waikit Fung, Mayasari Lim, Vishal Gauri, George D. Papasouliotis | 2006-07-18 |