Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7163896 | Biased H2 etch process in deposition-etch-deposition gap fill | Wenxian Zhu, Jengyi Yu, Siswanto Sutanto, Jeffrey Chih-Hou Lowe, Waikit Fung +1 more | 2007-01-16 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7163896 | Biased H2 etch process in deposition-etch-deposition gap fill | Wenxian Zhu, Jengyi Yu, Siswanto Sutanto, Jeffrey Chih-Hou Lowe, Waikit Fung +1 more | 2007-01-16 |