Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10273578 | Top lamp module for carousel deposition chamber | Joseph Yudovsky, Kevin Griffin, Garry K. Kwong, Kallol Bera, Li-Qun Xia +1 more | 2019-04-30 |
| 9441295 | Multi-channel gas-delivery system | Yan Rozenzon, Steven C. Beese | 2016-09-13 |
| 9240513 | Dynamic support system for quartz process chamber | Steven C. Beese, Yan Rozenzon | 2016-01-19 |
| 8562745 | Stable wafer-carrier system | Yan Rozenzon, Steven C. Beese | 2013-10-22 |
| 7643146 | Methods and apparatus for reducing noise in scatterometry measurements | Evan F. Cromwell, Steven C. Miller, Paul B. Comita | 2010-01-05 |
| 7522822 | Halogen lamp assembly with integrated heat sink | Roger M. Anderson, David W. Carlson, Michael Craig Hale | 2009-04-21 |