Issued Patents All Time
Showing 1–23 of 23 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7522822 | Halogen lamp assembly with integrated heat sink | Robert T. Trujillo, Roger M. Anderson, Michael Craig Hale | 2009-04-21 |
| 7307021 | Method for planarizing a thin film | — | 2007-12-11 |
| 7156727 | Web-format polishing pads and methods for manufacturing and using web-format polishing pads in mechanical and chemical-mechanical planarization of microelectronic substrates | — | 2007-01-02 |
| 6893337 | Web-format polishing pads and methods for manufacturing and using web-format polishing pads in mechanical and chemical-mechanical planarization of microelectronic substrates | — | 2005-05-17 |
| 6817928 | Method and apparatus for planarizing and cleaning microelectronic substrates | Scott A. Southwick, Scott E. Moore | 2004-11-16 |
| 6749489 | Method and apparatus for planarizing and cleaning microelectronic substrates | Scott A. Southwick, Scott E. Moore | 2004-06-15 |
| 6634932 | Web-format polishing pads and methods for manufacturing and using web-format polishing pads in mechanical and chemical-mechanical planarization of microelectronic substrates | — | 2003-10-21 |
| 6537136 | Web-format polishing pads and methods for manufacturing and using web-format polishing pads in mechanical and chemical-mechanical planarization of microelectronic substrates | — | 2003-03-25 |
| 6458291 | Light sensitive chemical-mechanical polishing aggregate | — | 2002-10-01 |
| 6458704 | Light sensitive chemical-mechanical polishing method | — | 2002-10-01 |
| 6398630 | Planarizing machine containing web-format polishing pad and web-format polishing pads | — | 2002-06-04 |
| 6394883 | Method and apparatus for planarizing and cleaning microelectronic substrates | Scott A. Southwick, Scott E. Moore | 2002-05-28 |
| 6368193 | Method and apparatus for planarizing and cleaning microelectronic substrates | Scott A. Southwick, Scott E. Moore | 2002-04-09 |
| 6358127 | Method and apparatus for planarizing and cleaning microelectronic substrates | Scott A. Southwick, Scott E. Moore | 2002-03-19 |
| 6310904 | Measurement method to facilitate production of self-aligning laser gyroscope block | Rodney H. Thorland, Daniel L. Sittler, Gerald R. Altmann | 2001-10-30 |
| 6277236 | Light sensitive chemical-mechanical polishing apparatus and method | — | 2001-08-21 |
| 6210257 | Web-format polishing pads and methods for manufacturing and using web-format polishing pads in mechanical and chemical-mechanical planarization of microelectronic substrates | — | 2001-04-03 |
| 6193588 | Method and apparatus for planarizing and cleaning microelectronic substrates | Scott A. Southwick, Scott E. Moore | 2001-02-27 |
| 5960025 | Device and method for achieving beam path alignment of an optical cavity | Rodney H. Thorland, Daniel L. Sittler, Gerald R. Altmann | 1999-09-28 |
| 5899752 | Method for in-situ cleaning of native oxide from silicon surfaces | H. Peter W. Hey | 1999-05-04 |
| 5482739 | Silicon nitride deposition | H. Peter W. Hey | 1996-01-09 |
| 4237245 | Hydrogenated block copolymers of butadiene containing a block of 1,4 and a block of 1,2-microstructure | Adel Farhan Halasa, James E. Hall | 1980-12-02 |
| 4226952 | Thermoplastic elastomer blends of alpha-olefin polymers and hydrogenated medium and high vinyl butadiene polymers | Adel Farhan Halasa, James E. Hall | 1980-10-07 |