Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date | Approx Value ⓘ |
|---|---|---|---|---|
| 6399510 | Bi-directional processing chamber and method for bi-directional processing of semiconductor substrates | Norma Riley, Roger N. Anderson, Paul B. Comita | 2002-06-04 | $34,666,000 |