Issued Patents All Time
Showing 26–38 of 38 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6277194 | Method for in-situ cleaning of surfaces in a substrate processing chamber | AnnaLena Thilderkvist, Ann Waldhauer | 2001-08-21 |
| 6254686 | Vented lower liner for heating exhaust gas from a single substrate reactor | David K. Carlson, Norma Riley, Doria W. Fan, Rekha Ranganathan | 2001-07-03 |
| 6159641 | Method for the repair of defects in lithographic masks | Thomas H. Baum, Franklin Mark Schellenberg | 2000-12-12 |
| 6153260 | Method for heating exhaust gas in a substrate reactor | David K. Carlson, Norma Riley, Doria W. Fan, Rekha Ranganathan | 2000-11-28 |
| 6042654 | Method of cleaning CVD cold-wall chamber and exhaust lines | Hali Forstner, Rekha Ranganathan | 2000-03-28 |
| 5924058 | Permanently mounted reference sample for a substrate measurement tool | Ann Waldhauer, David K. Carlson | 1999-07-13 |
| 5914050 | Purged lower liner | David K. Carlson, Kimberly E. Klinck, Harold J. Mellen, III | 1999-06-22 |
| 5686206 | Method for the repair of lithographic masks | Thomas H. Baum, Frank Schellenberg | 1997-11-11 |
| 5525392 | Magnetic recording medium having a fluorinated polymeric protective layer formed by an ion beam | Thomas H. Baum, Mark S. Crowder, George Tyndall | 1996-06-11 |
| 5510164 | Single-sided ablative worm optical disk with multilayer protective coating | Margaret E. Best, Kurt A. Rubin, Takao Suzuki, Wade Wai-Chung Tang, Yu-Sze Yen | 1996-04-23 |
| 5407710 | Laser interconnection of circuits on transparent substrate | Thomas H. Baum, Carl E. Larson, George Tyndall | 1995-04-18 |
| 5246745 | Laser-induced chemical vapor deposition of thin-film conductors | Thomas H. Baum, John R. Lankard Sr., Thoams F. Redmond, Thomas A. Wassick, Robert Jackson | 1993-09-21 |
| 4880959 | Process for interconnecting thin-film electrical circuits | Thomas H. Baum, Robert Jackson | 1989-11-14 |