| 9914816 |
Methods and materials for depolymerizing polyesters |
Robert David Allen, Krishna Bajjuri, Gregory Breyta, James L. Hedrick |
2018-03-13 |
$2,527,000 |
| 9255194 |
Methods and materials for depolymerizing polyesters |
Robert David Allen, Krishna Bajjuri, James L. Hedrick, Gregory Breyta |
2016-02-09 |
$2,307,000 |
| 8945808 |
Self-topcoating resist for photolithography |
Robert Allen David, Phillip Brock, Daniel P. Sanders, Ratnam Sooriyakumaran, Linda Karin Sundberg +2 more |
2015-02-03 |
$3,062,000 |
| 8034532 |
High contact angle topcoat material and use thereof in lithography process |
Robert David Allen, Phillip Brock, Ratnam Sooriyakumaran, Linda Karin Sundberg, Hoa D. Truong |
2011-10-11 |
$5,277,000 |
| 7855045 |
Immersion topcoat materials with improved performance |
Robert David Allen, Phillip Brock, Dario Gil, William D. Hinsberg, Linda Karin Sundberg +1 more |
2010-12-21 |
$6,138,000 |
| 7807340 |
Photoresists for visible light imaging |
Gregory Breyta, Daniel J. Dawson, Gregory Michael Wallraff |
2010-10-05 |
$4,341,000 |
| 7767385 |
Method for lithography for optimizing process conditions |
Sharee McNab, Steven E. Steen, Raman Viswanathan, Gregory Michael Wallraff |
2010-08-03 |
$4,325,000 |
| 7585609 |
Bilayer film including an underlayer having vertical acid transport properties |
Gregory Michael Wallraff |
2009-09-08 |
$16,659,000 |
| 7354692 |
Photoresists for visible light imaging |
Gregory Breyta, Daniel J. Dawson, Gregory Michael Wallraff |
2008-04-08 |
$6,866,000 |
| 7288362 |
Immersion topcoat materials with improved performance |
Robert David Allen, Phillip Brock, Dario Gil, William D. Hinsberg, Linda Karin Sundberg +1 more |
2007-10-30 |
$4,304,000 |
| 7160665 |
Method for employing vertical acid transport for lithographic imaging applications |
Gregory Michael Wallraff |
2007-01-09 |
$12,448,000 |
| 7135595 |
Photoresist composition |
Robert David Allen, Gregory Breyta, Phillip Brock, Richard Anthony DiPietro, Debra Fenzel-Alexander +5 more |
2006-11-14 |
$5,090,000 |
| 7014980 |
Photoresist composition |
Robert David Allen, Gregory Breyta, Phillip Brock, Richard Anthony DiPietro, Debra Fenzel-Alexander +5 more |
2006-03-21 |
$6,971,000 |
| 6806026 |
Photoresist composition |
Robert David Allen, Gregory Breyta, Phillip Brock, Richard Anthony DiPietro, Debra Fenzel-Alexander +5 more |
2004-10-19 |
$7,667,000 |
| 5407710 |
Laser interconnection of circuits on transparent substrate |
Thomas H. Baum, Paul B. Comita, George Tyndall |
1995-04-18 |
$15,105,000 |
| 5220044 |
Ligand stabilized +1 metal beta-diketonate coordination complexes and their use in chemical vapor deposition of metal thin films |
Thomas H. Baum, Scott K. Reynolds |
1993-06-15 |
$8,023,000 |
| 5096737 |
Ligand stabilized +1 metal beta-diketonate coordination complexes and their use in chemical vapor deposition of metal thin films |
Thomas H. Baum, Scott K. Reynolds |
1992-03-17 |
$18,922,000 |
| 4775608 |
Generation of capacitive servo patterns on magnetic storage disks |
Thomas H. Baum, Phillip Brock, James Economy, Robert Jackson, James R. Lyerla, Jr. +1 more |
1988-10-04 |
$27,996,000 |
| 4760013 |
Sulfonium salt photoinitiators |
Nigel Hacker |
1988-07-26 |
$27,796,000 |
