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Home › Ligand stabilized +1 metal beta-diketonate coordination complexes and their use in chemical vapor deposition of metal thin films

Ligand stabilized +1 metal beta-diketonate coordination complexes and their use in chemical vapor deposition of metal thin films

US Patent 5096737 · Granted Mar 17, 1992

Estimated economic value: $18,922,000 ⓘ

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