| 8440388 |
Method to restore hydrophobicity in dielectric films and materials |
Michael Thomas, James Drage |
2013-05-14 |
$10,336,000 |
| 7858294 |
Method to restore hydrophobicity in dielectric films and materials |
Michael Thomas, James Drage |
2010-12-28 |
$6,713,000 |
| 7678462 |
Spin-on-glass anti-reflective coatings for photolithography |
Joseph Kennedy, Teresa Baldwin, Richard Spear |
2010-03-16 |
$8,838,000 |
| 7504470 |
Polyorganosiloxane dielectric materials |
Juha Rantala, Jyri Paulasaari, Janne Kylmä, Turo T. Törmänen, Jarkko J. Pietikainen +1 more |
2009-03-17 |
|
| 7029826 |
Method to restore hydrophobicity in dielectric films and materials |
Michael Thomas, James Drage |
2006-04-18 |
$12,261,000 |
| 7011889 |
Organosiloxanes |
William B. Bedwell, Roger Leung, Nancy Iwamoto, Jan Nedbal, Songyuan Xie +2 more |
2006-03-14 |
$14,592,000 |
| 7012125 |
Spin-on-glass anti-reflective coatings for photolithography |
Joseph Kennedy, Teresa Baldwin, Richard Spear |
2006-03-14 |
$14,592,000 |
| 6969753 |
Spin-on-glass anti-reflective coatings for photolithography |
Teresa Baldwin, Joseph Kennedy, Richard Spear |
2005-11-29 |
$8,769,000 |
| 6967172 |
Colloidal silica composite films for premetal dielectric applications |
Roger Leung, Denis Endisch, Songyuan Xie, Yanpei Deng |
2005-11-22 |
$13,106,000 |
| 6962727 |
Organosiloxanes |
William B. Bedwell, Roger Leung, Nancy Iwamoto, Jan Nedbal, Songyuan Xie +2 more |
2005-11-08 |
$10,336,000 |
| 6956097 |
Spin-on-glass anti-reflective coatings for photolithography |
Joseph Kennedy, Teresa Baldwin, Richard Spear |
2005-10-18 |
$7,534,000 |
| 6838124 |
Deposition of fluorosilsesquioxane films |
— |
2005-01-04 |
$8,160,000 |
| 6824879 |
Spin-on-glass anti-reflective coatings for photolithography |
Teresa Baldwin, Joseph Kennedy, Richard Spear |
2004-11-30 |
$32,986,000 |
| 6743856 |
Synthesis of siloxane resins |
Lisa Figge, Scott Lefferts |
2004-06-01 |
$7,579,000 |
| 6723780 |
Novolac polymer planarization films with high temperature stability |
Todd Krajewski, Richard Spear |
2004-04-20 |
$7,614,000 |
| 6653718 |
Dielectric films for narrow gap-fill applications |
Roger Leung, Denis Endisch, Songyuan Xie, Yanpei Deng |
2003-11-25 |
$16,986,000 |
| 6517951 |
Novolac polymer planarization films with high temperature stability |
Todd Krajewski, Richard Spear |
2003-02-11 |
$18,571,000 |
| 6512071 |
Organohydridosiloxane resins with high organic content |
Scott Lefferts, Lisa Figge |
2003-01-28 |
$36,147,000 |
| 6506497 |
Spin-on-glass anti-reflective coatings for photolithography |
Joseph Kennedy, Teresa Baldwin, Richard Spear |
2003-01-14 |
$16,347,000 |
| 6506831 |
Novolac polymer planarization films with high temperature stability |
Todd Krajewski, Richard Spear |
2003-01-14 |
$16,347,000 |
| 6506441 |
Novolac polymer planarization films with high temperature stability |
Todd Krajewski, Richard Spear |
2003-01-14 |
$16,347,000 |
| 6472076 |
Deposition of organosilsesquioxane films |
— |
2002-10-29 |
$42,826,000 |
| 6444495 |
Dielectric films for narrow gap-fill applications |
Roger Leung, Denis Endisch, Songyuan Xie, Yanpei Deng |
2002-09-03 |
$17,105,000 |
| 6440550 |
Deposition of fluorosilsesquioxane films |
— |
2002-08-27 |
$12,498,000 |
| 6365765 |
Spin-on-glass anti-reflective coatings for photolithography |
Teresa Baldwin, Joseph Kennedy, Richard Spear |
2002-04-02 |
$19,447,000 |
