Immersion topcoat materials with improved performance

Assignee

• IBM

Inventors

• Robert David Allen (115 patents)
• Phillip Brock (58 patents)
• Dario Gil (19 patents)
• William D. Hinsberg (10 patents)
• Carl E. Larson (19 patents)
• Linda Karin Sundberg (47 patents)
• Gregory Michael Wallraff (59 patents)

View full patent text on Google Patents →